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Photoresists are light-sensitive and age during storage, so they are supplied in light-protected bot… read 閱讀全文
This content provides detailed information on the process step of photoresist, including cleaning of… read 閱讀全文
The development of PMMA films for e-beam lithography involves using solvent-based developers like MI… read 閱讀全文
The process conditions for coating with resist involve several considerations to avoid the formation… read 閱讀全文