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Photoresist developers are key to achieving reproducible results in lithography. Factors like concen… read 閱讀全文
Photoresists are exposed using masks in suitable exposure systems. They are sensitive in the broad b… read 閱讀全文
The softbake of photoresist films, performed at 90 – 100 °C, serves to dry the films of residual sol… read 閱讀全文
Air bubbles can form in photoresist films due to agitation, temperature differences, or improper coa… read 閱讀全文
The optimum coating parameters for photoresists to achieve good film images involve spin speeds betw… read 閱讀全文
Photoresist adhesion varies on different wafers. Substrates such as silica, silicon nitride, and bas… read 閱讀全文
The optimal pre-treatment of substrates for photoresists is crucial for adhesive strength. Silicon, … read 閱讀全文
Age-related changes can significantly impact the quality of photoresists, causing darkening, reduced… read 閱讀全文
Photoresists are light-sensitive and their stability depends on storage conditions. They should be s… read 閱讀全文
Photoresists, used in microelectronics and microsystems, contain film-forming agents and light-sensi… read 閱讀全文