AR 600-57 developer for PMMA e-beam resist
The “green" PMMA developer alternative to MIBK
Motivation
A standard developer for PMMA coatings is a mixture of MIBK and IPA. Since MIBK will be reclassified as probable carcinogen from the end of 2022, Allresist is striving to offer a green, water-based PMMA developer that is harmless to health and also significantly more ecological.
傳統電子束微影使用的PMMA阻劑,其顯影劑含MIBK(甲基異丁酮). 2022年底MIBK判定為可能致癌物質,使用上受到管制.
ALLRESIST公司致力於研究較安全的替代品,以較低成本的水性溶液取代.
Research & Development
Result
| Table 1: Processing parameters and development results of PMMA resists AR-P 649.04 #2006151 and AR-P 641.09 #2112225. | ||||
| AR-P 649.04 #2006151 | AR-P 641.09 #2112225 | |||
| Coating | 150nm@4000rpm | 530nm@4000rpm | ||
| Soft-bake | 180℃ x 60min | 200℃ x 60min | ||
| Expsoure | E-beam, 30kV | E-beam, 30kV | ||
| Development | AR 600-57, 60sec Stop: H2O, 60sec | AR 600-56, 60sec Stop: IPA, 60sec | AR 600-57, 60sec Stop: H2O, 60sec | AR 600-56, 60sec Stop: IPA, 60sec |
| D0 (uC/cm2) | 80 | 213 | 125 | 251 |
| Contrast | 3.3 | 2.9 | 4.2 | 3.8 |
| AR 600-57 is a mixture of isopropanol and water – this may sound surprising at first, IPA is known as a developer for PMMA, however, usually a high exposure dose is required. Mixing with water that by itself does not develop PMMA at all, results in a new developer with high process speed close to that or even faster than MIBK/IPA mixtures. In further investigations, it was found, as shown in Table 1, that AR 600-57 increases the sensitivity of PMMA resists while maintaining contrast. The investigations could also already be reproduced. The developer is currently attracting a great deal of interest from our cooperation partners, so that further (positive) results are in prospect. AR 600-57是IPA與水的混合物 – IPA一般用於PMMA時需較高的曝光劑量, 純水更是不可能顯開PMMA阻劑. 令人訝異的是,兩者混合,顯影速度比傳統MIBK/IPA混合物還快一些. 更多的研究如表(1)顯示, 以AR 600-57顯影會提高PMMA阻劑的敏感度同時維持相當的對比度. 研究也顯示結果的重現性. 很多合作夥伴對AR 600-57有興趣,預期有更多的正面結果. | ||||
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