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Lithorgraphy Materials & ancillaries
微奈米微影製程材料

► EBL Resist 電子束微影阻劑
► tSPL Resist 熱掃描微影阻劑
► Conductive Coating 導電塗佈
► Photoresist 光阻劑
► Protective Coating 蝕刻保護塗層
► Bottom Resist for 2L Lift-off 底層阻劑
► Litho Process Chemicals 微影製程化學品

Contents are base on principal’s product TDS
內容取材自原廠產品技術資料