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附註:產品名稱為淺灰色者,指該產品無固定生產排程,會有最小訂購量,或需有原料待料時間。

EBL resist 電子束微影阻劑

AR-P 630 – 670 PMMA resist


AR-P 617 series copolymer EBL resist


AR-P 6200 series copolymer EBL resist


AR-P 6510 series thick resist exposure by ebeam, synchrotron or x-ray附註


AR-N 7520 series EBL resist, non-CAR type


AR-N 7520 new series EBL resist, non-CAR type


AR-N 8400 series (Medusa 84 SiH) HSQ EBL resist

tSPL resist 熱掃描微影阻劑

PPA polymer and preparation kits

Conductive coating 導電塗佈

AR-PC 5094.02 conductive coating

Photoresist 光阻

AR-P 1200 series positive photoresist for spray coating


AR-P 3100 series adhesion enhenced positive photoresist


AR-P 3200 series thick positive photoresist for electro-plating

系列產品中AR-P 3250為固定排程生產


AR-P 3500 series standard positive photoresist


AR-P 3740 series standard positive photoresist


AR-P 5350 positive photoresist for lift off


SX AR-P 3500/8 positive photoresist thermostable up to 300℃


AR-N 2200 series negative photoresist for spray coating


AR-N 4340 negative CAR photoresist for sub-un application


SX AR-N 4340/7 negative photoresist thermostable up to 300℃


AR-N 4400 series thick layer negative photoresist


AR-N 4600-10 thick layer negative photoresist for permanent film


Protective resist 蝕刻保護層

AR-PC 5040 resist for KOH etching


SX AR-PC 5000/41 resist for KOH and HF etching


Bottom resist for 2L lift off 底層阻劑

AR-BR 5400 series bottom resist

Lithography Process Chemicals 微影製程化學品
Adhesion promoter 增黏劑

AR 300-80 new (organic silicon compound)


Developer 顯影劑

buffered developer 含緩衝鹼性水溶液 AR 300系列

(AR 300-26 ; AR 300-35)


metal ion free developer 不含金屬離子TMAH水溶液 AR 300-40系列

(AR 300-44 ; AR 300-46 ; AR 300-47 ; AR 300-475 )


AR 600 family ultra pure developer for ebeam resist


TMAH 2.38% 20L 桶裝


Remover 阻劑去除劑

AR remover family


Photoresist stripper – solvent mixture without NMP, DMSO and TMAH

通用型光阻去除劑 – 不含NMP,DMSO,TMAH成份


Stopper 顯影抑制劑

Stopper family – AR 600-60 ; AR 600-61, X AR 600-60/1


Thinner 稀釋劑

Thinner family – AR 300-12; AR 600-02; AR 600-07; AR 600-09; AR 300-74/1


Contents are base on principal’s product TDS
內容取材自原廠產品技術資料