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Photoresists are light-sensitive and age during storage, so they are supplied in light-protected bot… read 閱讀全文
This content provides detailed information on the process step of photoresist, including cleaning of… read 閱讀全文
The development of PMMA films for e-beam lithography involves using solvent-based developers like MI… read 閱讀全文
The process conditions for coating with resist involve several considerations to avoid the formation… read 閱讀全文
The addition of photoactive compounds (PACs, naphthoquinone diazide (NQD)) to alkali-soluble novolac… read 閱讀全文
Polymers such as PMMAs, PMMA co MA, and PMS co Cl-MMA are extensively used in electron beam lithogra… read 閱讀全文
The photoresist’s photosensitive components are naphthoquinone diazides (NQD), which react to form e… read 閱讀全文
The main components of resists are solvents, with contents ranging from 50% to 99%. Early resists co… read 閱讀全文
Photoresists used in microelectronics and microsystems technology create µm- and sub-µm structures. … read 閱讀全文
The patterning of negative resists is achieved through cross-linking agents, such as radical starter… read 閱讀全文