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The new developer X AR 600-50/2 is highly sensitive and selective for AR-P 617, with minimal dark er… read 閱讀全文
The article discusses the evaluation of new developer systems for the highly sensitive e-beam resist… read 閱讀全文
Summary: For the development of AR-P 5320 positive photoresist, AR 300-26 developer is recommended, … read 閱讀全文
Dr. Lothar Hahn from the Karlsruhe Institute of Technology assessed various developers for CSAR 62, … read 閱讀全文
The content discusses development procedures for removing exposed areas of positive-tone resists and… read 閱讀全文
The development cascade is recommended for optimal performance and cleanliness during immersion deve… read 閱讀全文
The development of exposed CSAR 62 resist films is typically done through immersion development with… read 閱讀全文
Developer AR 300-35 is recommended for structuring photoresists on alkali-sensitive substrates, such… read 閱讀全文
The use of alkaline developers for aluminium substrates presents challenges, as some developers can … read 閱讀全文
Aqueous-alkaline developers can age due to CO2 absorption, with buffered types being more stable tha… read 閱讀全文