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The use of anisolic PPA solutions allows for the creation of well-defined two- and three-layer syste… read 閱讀全文
The two-layer e-beam resist system with novolacs as the bottom resist allows for adjustable removal … read 閱讀全文
The fabrication of T-gates in three-layer processes involves careful control of resist coatings and … read 閱讀全文
The article discusses the use of Anisole PPA solutions to coat PMMAcoMA 33 (AR-P 617) for creating d… read 閱讀全文