High resolution on quartz with Electra 92 on HSQ resists

An accurate patterning on quartz substrates is not possible without the use of a conductive coating. Investigations of the company Raith GmbH demonstrated that an HSQ resist XR1541 on a quartz substrate can be patterned with very high quality after coating with Electra 92. According to Raith GmbH has this so far not been achieved with any other conductive coatings. Resist XR1541 (20 nm thick) was irradiated with the required dose of 4300 µC/cm² (area dose). AR-PC 5090.2 (former SX AR-PC 5000/90.2) was then completely removed within 2 minutes with warm water, and no residues could be observed. After development of the HSQ resist, the desired structures with 20 nm-bars remained (see Fig.).

Fig.  20 nm HSQ bars, generated on quartz with Electra 92

Even layers with higher film thicknesses can be structured. CAR 44 is thus also suitable as electron beam resists for this kind of applications.