Generation of secondary electrons

Alongside the occuring elastic scattering effects at a collision with other electrons or atoms, incoming primary electrons can also be scattered inelastically when entering or traversing resist layers. In this process, primary electrons transfer a part of their energy or respectively their impulse onto other electrons. The released secondary electrons, which may have another wavelength, e.g. Auger electrons, are likewise able to  break down chemical bonds and release further elctrons of less energy in the material. This results in the formation of an electron cascade.