Water-based resists
The majority of photoresists is almost exclusively soluble in organic solvents like e.g. PGMEA (propylene glycol methyl acetate, German: PMA). But there are exceptions: cathode ray tube screens for example were in the past manufactured with casein and ammonium dichromate as crosslinking agent. Due to the toxic and carcinogenic properties of dichromate, this process is however no longer performed. In the manufacture of solar cells, preferably aqueous coatings on gelatine basis are used today. Layers are after exposure treated with H2O2 and developed with water. Allresist has developed similar negative resists within the framework of a research project. Many possible applications exist for water-based resists, since they are very well suited for multi-layer systems in combination with normal photoresists and also suitable for organic solvent-sensitive films. Photoresist patterns are in this case produced on the gelatine layer and structures are then removed in a water bath. By these means, patterned resist films are generated.
Overview of photoresist-others
Alkali-stable positive resist obtained after treatment with HMDS
Aqueous negative resist based on gelatine
Atlas 46 for nanoimprint lithography
Ethanol and toluene-resistant photoresist AR-U 4060
Fluorescent resist structures with photoresists
Laser ablation of PPA (Phoenix 81)
Negative CAR PMMA resist SX AR-N 4810/1
Positive polyimide one-layer resist
Resist for near infrared (NIR)
Structuring by ablation of the resist materials
Structuring of polyphthalaldehydes with photolithography
Surface imaging resist system SX AR-N 7100 – silylable photoresist
Top surface imaging (TSI) photoresist – principles
Two-layer photoresist system for water-sensitive substrates
Two-layer resist system for hydrofluoric acid etching
UV-structuring of PMMA resists
Water-based resists