Manufacture of plasmonic nanostructures with CSAR 62

Bjarke Rolighed Jeppesen (Department of Physics and Astronomy, Aarhus University) used a PMMA resist (AR-P 679.03) for the fabrication of plasmonic structures (Ag dots on quartz substrates). These nanostructures may e.g. serve as optical antennas for the detection of single molecules. To avoid the undesirable charges on the quartz substrate, Electra 92 was used successfully. Mr. Jeppesen commented very positively on the simple and reliable handling of the conductive resist and kindly provided the following pictures:

Silver nanoparticles on quartz substrate

Plasmonic nanostructures of similarly good quality but with even higher sensitivity could quite likely be produced if CSAR 62 would be used instead of PMMA for this purpose.

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